1,1,3,3-Tetramethydisiloxane, TMDS, TMDSO
Chemical Structure
Introduction
SiSiB® HF2030-M134 fluid is a colorless to yellowish clear liquid.
Typical Physical Properties
| Product: | 1,1,3,3-Tetramethydisiloxane, TMDS, TMDSO |
|---|---|
| CAS No.: | 3277-26-7 or 30110-74-8 |
| EINECS No.: | 221-906-4 |
| Formula: | C4H14OSi2 |
| Molecular Weight: | 134.33 |
| Boiling Point: | 70 °C [760mmHg] |
| Flash Point: | -12°C |
| Color and Appearance: | Colorless transparent liquid |
| Specific Gravity [25°C]: | 0.757 |
| Refractive Index [25°C]: | 1.3669 [20°C] |
| Active Content: | Min.99% |
| Hydrogen Content: | 1.49% |
| SiH Content: | 14.9mmol/g |
| Available molecular weight: |
Available in different viscositys and Si-H content. |
| Other SiH contents can be made upon request. |
Applications
SiSiB® HF2030-M134 fluid is used in for Plasma Enhanced Chemical Vapor Deposition(PECVD) of glass on a variety of substrates at low temperature.
SiSiB® HF2030-M134 fluid is also employed in reductive halogenation of aldehydes and epoxides.
Packings
SiSiB® HF2030-M134 fluid is supplied in 20Kg or 130Kg steel drum.